Entegris Announces Higher-Purity Gas Purification System Platform with Expanded Manufacturing in Asia
"Our customers face unprecedented contamination control challenges to efficiently manufacture today's increasingly complex leading-edge-devices. The new Gatekeeper GPS family of systems provide the advanced solutions required to maximize yield in these environments," said
Semiconductor processes for advanced nodes, as well as LED manufacturing requirements, call for increased purity to remove defect-causing contaminants found in process gases. The GateKeeper GPS family of systems removes a variety of contaminants from gas streams down to the parts-per-trillion level and can be configured to a wide range of flow rates. Gases purified include CDA, N2, H2, H2 for EUV, Ar and NH3. Additionally, manufacturers are looking for tools that require significantly less sub-fab floor space. The reduced footprint allows customers to devote valuable sub-fab floor space to other tool needs or increase purification capacity with additional systems.
"We collaborated closely with our customers to identify purity requirements to meet their need to remove new contaminants and increased sensitivity to known contaminants," said Director of Gas Purification Product Management,
The latest GateKeeper system will be on display during the SEMICON®
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