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UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 13G/A UNDER THE SECURITIES EXCHANGE ACT OF 1934 (AMENDMENT NO. 3)* Metron Technology N.V. ---------------------- (Name of Issuer) Common Shares, par value NLG 0.96 per share ------------------------------------------- (Title of Class of Securities) N5665B105 -------------- (CUSIP Number) December 31, 2001 ----------------- (Date of Event Which Requires Filing of This Statement) Check the appropriate box to designate the rule pursuant to which this Schedule is filed: / / Rule 13d-1(b) / / Rule 13d-1(c) /X/ Rule 13d-1(d) * The remainder of this cover page shall be filled out for a reporting person's initial filing on this form with respect to the subject class of securities, and for any subsequent amendment containing information which would alter the disclosures provided in a prior cover page. The information required in the remainder of this cover page shall not be deemed to be "filed" for the purpose of Section 18 of the Securities Exchange Act of 1934 ("Act") or otherwise subject to the liabilities of that section of the Act but shall be subject to all other provisions of the Act (however, see the Notes). Page 1 of 5 pages --------------------------- ----------------------- CUSIP NO. N5665B105 13G/A PAGE 2 OF 5 PAGES --------------------------- ----------------------- - ---------- ------------------------------------------------------------------- 1 NAME OF REPORTING PERSON I.R.S. IDENTIFICATION NO(S). OF ABOVE PERSON(S) (ENTITIES ONLY)\ Entegris, Inc. - ---------- ------------------------------------------------------------------- 2 CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP (a) (b) - ---------- ------------------------------------------------------------------- 3 SEC USE ONLY - ---------- ------------------------------------------------------------------- 4 CITIZENSHIP OR PLACE OF ORGANIZATION Minnesota - ---------- ------------------------------------------------------------------- 5 SOLE VOTING POWER NUMBER OF 1,590,062* SHARES ----- ------------------------------------------------- BENEFICIALLY 6 SHARED VOTING POWER OWNED BY 0 EACH ----- ------------------------------------------------- REPORTING 7 SOLE DISPOSITIVE POWER PERSON 1,590,062* WITH: ----- ------------------------------------------------- 8 SHARED DISPOSITIVE POWER 0 - ---------- ------------------------------------------------------------------ 9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON 1,590,062* - ---------- ------------------------------------------------------------------- 10 CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES - ---------- ------------------------------------------------------------------- 11 PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9 12.4% - ---------- ------------------------------------------------------------------- 12 TYPE OF REPORTING PERSON CO - ---------- ------------------------------------------------------------------- * Includes 24,375 shares issuable to James Dauwalter, President of Entegris, Inc. ("Entegris"), pursuant to options exercisable within 60 days of December 31, 2001. Pursuant to an agreement between Mr. Dauwalter and Entegris, Mr. Dauwalter assigned ownership rights to all shares issuable upon exercise of such options to Entegris. Page 2 of 5 pages ITEM 1. (a) NAME OF ISSUER Metron Technology N.V. (b) ADDRESS OF ISSUER'S PRINCIPAL EXECUTIVE OFFICES 1350 Old Bayshore Highway, Suite 210 Burlingame, CA 94010 ITEM 2. (a) NAME OF PERSON FILING Entegris, Inc. (b) ADDRESS OF PRINCIPAL BUSINESS OFFICE OR, IF NONE, RESIDENCE 3500 Lyman Boulevard Chaska, MN 55318 (c) CITIZENSHIP Minnesota (d) TITLE OF CLASS OF SECURITIES Common Shares, par value NLG 0.96 per share (e) CUSIP NUMBER N5665B105 ITEM 3. IF THIS STATEMENT IS FILED PURSUANT TO SECITONS 240.13d-1(b), OR 240.13d-2(b) OR (c), CHECK WHETHER THE PERSON FILING IS A: Not applicable. ITEM 4. OWNERSHIP (a) AMOUNT BENEFICIALLY OWNED: 1,590,062 shares, including 24,375 shares issuable to James Dauwalter, President of Entegris, Inc. ("Entegris"), pursuant to options exercisable within 60 days of December 31, 2001. Pursuant to an agreement between Mr. Dauwalter and Entegris, Mr. Dauwalter assigned ownership rights to all shares issuable upon exercise of such options to Entegris. (b) PERCENT OF CLASS: 12.4% (c) NUMBER OF SHARES AS TO WHICH SUCH PERSON HAS: (i) Sole power to vote or to direct the vote: 1,590,062 (ii) Shared power to vote or to direct the vote: 0 (iii) Sole power to dispose or to direct the disposition of: 1,590,062 (iv) Shared power to dispose or to direct the disposition of: 0 Page 3 of 5 ITEM 5. OWNERSHIP OF FIVE PERCENT OR LESS OF A CLASS Not applicable. ITEM 6. OWNERSHIP OF MORE THAN FIVE PERCENT ON BEHALF OF ANOTHER PERSON Not applicable. ITEM 7. IDENTIFICATION AND CLASSIFICATION OF THE SUBSIDIARY WHICH ACQUIRED THE SECURITY BEING REPORTED ON BY THE PARENT HOLDING COMPANY Not applicable. ITEM 8. IDENTIFICATION AND CLASSIFICATION OF MEMBERS OF THE GROUP Not applicable. ITEM 9. NOTICE OF DISSOLUTION OF A GROUP Not applicable. ITEM 10. CERTIFICATION Not applicable. Page 4 of 5 pages SIGNATURE After reasonable inquiry and to the best of my knowledge and belief, I certify that the information set forth in this statement is true, complete and correct. Dated: February 13, 2002 ENTEGRIS, INC. By: /s/ John Villas ---------------------------- John Villas Executive Vice President and Chief Financial Officer Page 5 of 5 pages