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UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 2)* Entegris, Inc. ------------------------------------------------ (Name of Issuer) Common Stock ------------------------------------------------ (Title of Class of Securities) 29362U104 ------------------------------------------------ (CUSIP Number) *The remainder of this cover page shall be filled out for a reporting person's initial filing on this form with respect to the subject class of securities, and for any subsequent amendment containing information which would alter the disclosures provided in a prior cover page. The information required in the remainder of this cover page shall not be deemed to be "filed" for the purpose of Section 18 of the Securities Exchange Act of 1934 ("Act") or otherwise subject to the liabilities of that section of the Act but shall be subject to all other provisions of the Act (however, see the Notes). Page 1 of 5 - -------------------------- -------------------------- CUSIP No. 29362U104 13G/A Page 2 of 5 Pages - -------------------------- -------------------------- - ---------- --------------------------------------------------------------------- 1 NAME OF REPORTING PERSON S.S. or I.R.S. IDENTIFICATION NO. OF ABOVE PERSON James E. Dauwalter - ---------- --------------------------------------------------------------------- 2 CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP* Not Applicable. (a) (b) - ---------- --------------------------------------------------------------------- 3 SEC USE ONLY - ---------- --------------------------------------------------------------------- 4 CITIZENSHIP OR PLACE OF ORGANIZATION U.S.A. - ---------- --------------------------------------------------------------------- 5 SOLE VOTING POWER 941,467 NUMBER OF ------- ------------------------------------------------------ SHARES 6 SHARED VOTING POWER BENEFICIALLY OWNED BY 3,835,848 EACH ------- ------------------------------------------------------ REPORTING 7 SOLE DISPOSITIVE POWER PERSON WITH 941,467 ------- ------------------------------------------------------ 8 SHARED DISPOSITIVE POWER 3,835,848 - ---------- --------------------------------------------------------------------- 9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON 4,777,315 - ---------- --------------------------------------------------------------------- 10 CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES* - ---------- --------------------------------------------------------------------- 11 PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9 6.7% - ---------- --------------------------------------------------------------------- 12 TYPE OF REPORTING PERSON* IN - ---------- --------------------------------------------------------------------- * SEE INSTRUCTION BEFORE FILLING OUT! Page 2 of 5 Item 1. (a) Name of Issuer: Entegris, Inc. (b) Address of Issuer's Principal Executive Office: 3500 Lyman Boulevard Chaska, MN 55318 Item 2. (a) Name of Person Filing: James E. Dauwalter (b) Address of Principal Business Office: 3500 Lyman Boulevard Chaska, MN 55318 (c) Citizenship: U.S.A. (d) Title of Class of Securities: Common Stock, $.01 par value (e) CUSIP Number: 29362U104 Item 3. Not Applicable. Item 4. Ownership (a) Amount beneficially owned: 4,777,315 shares. The number of shares beneficially owned as of December 31, 2002 includes 315,337 shares held directly; 640,333 shares held by family members; 50,354 shares held by family foundation; 2,250,000 shares held by Carville Company, L.P. and 600,000 shares held by Carville Company II, L.P. grantor retained annuity trusts which were formed by Reporting Person as part of a series of transactions for estate planning purposes; 15,000 shares Page 3 of 5 held by a security charitable remainder trust; 280,161 shares allocated to Mr. Dauwalter's account under the Entegris, Inc. ESOP, and an aggregate of 626,130 shares subject to stock options exercisable within 60 days. (b) Percent of Class: 6.7% (c) Number of Shares as to Which Such Person Has: (i) sole power to vote or direct the vote: 941,467 (ii) shared power to vote or direct the vote: 3,835,848 (iii) sole power to dispose or direct the disposition of: 941,467 (iv) shared power to dispose or to direct the disposition of: 3,835,848 Item 5. Not Applicable. Item 6. Not Applicable. Item 7. Not Applicable. Item 8. Not Applicable. Item 9. Not Applicable. Item 10. Not Applicable. Page 4 of 5 SIGNATURE After reasonable inquiry and to the best of my knowledge and belief, I certify that the information set forth in this statement is true, complete and correct. Dated: February 13, 2003 By: /s/ James E. Dauwalter ------------------------------- James E. Dauwalter Page 5 of 5