SEC Filing | Entegris, Inc.

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SEC FORM 4 SEC Form 4

FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934
or Section 30(h) of the Investment Company Act of 1940

OMB APPROVAL

OMB Number:			3235-0287
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Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

1. Name and Address of Reporting Person^*

KLINGL GARY F

(Last)

(First)

(Middle)

3500 LYMAN BOULEVARD

(Street)

CHASKA

55318

(City)

(State)

(Zip)

2. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ ENTG ]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

X	Director	10% Owner
	Officer (give title below)	Other (specify below)

3. Date of Earliest Transaction (Month/Day/Year)
08/10/2005

4. If Amendment, Date of Original Filed (Month/Day/Year)

6. Individual or Joint/Group Filing (Check Applicable Line)

X	Form filed by One Reporting Person
	Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	Code	V	Amount	(A) or (D)	Price		6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
Common Stock	08/10/2005	08/10/2005	A		4,167	A	⁽¹⁾	4,167	D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares	8. Price of Derivative Security (Instr. 5)		10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)

Explanation of Responses:

1. These shares were awarded as restricted stock pursuant to the Entegris, Inc. Outside Directors? Option Plan which provides for the award of restricted stock to directors of the Issuer in consideration for services as such.

Remarks:

	/s/ Peter W. Walcott Attorney-in-Fact for Gary F Klingl	08/12/2005
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.

 POWER OF ATTORNEY

Know all by these presents, that the undersigned
hereby constitutes and appoints Peter W. Walcott the undersigned's true and
lawful attorney in fact to:

1.  execute for and on behalf of the
undersigned, in the undersigned's capacity as a directo fo ENTEGRIS, INC.
(the "Company"), Forms 3, 4, and 5 in accordance with Section 16(a) of the
Securities Exchange Act of 1934 and the rules thereunder, and any other
forms or reports the undersigned may be required to file in connection with
the undersigned's ownership, acquisition, or disposition of securities of
the Company;

2.  do and perform any and all acts for and on behalf of
the undersigned which may be necessary or desirable to complete and execute
any such Forms 3, 4, or 5, or other form or report, and timely file such
form or report with the United States Securities and Exchange Commission
and any stock exchange or similar authority; and

3.  take any other
action of any type whatsoever in connection with the foregoing which, in
the opinion of such attorney in fact, may be of benefit to, in the best
interest of, or legally required by, the undersigned, it being understood
that the documents executed by such attorney in fact on behalf of the
undersigned pursuant to this Power of Attorney shall be in such form and
shall contain such terms and conditions as such attorney in fact may
approve in such attorney in fact's discretion.

The undersigned hereby
grants to such attorney in fact full power and authority to do and perform
any and every act and thing whatsoever requisite, necessary, or proper to
be done in the exercise of any of the rights and powers herein granted, as
fully to all intents and purposes as the undersigned might be or could do
if personally present, with full power of substitution or revocation,
hereby ratifying and confirming all that such attorney in fact, or such
attorney in fact's substitute or substitutes, shall lawfully do or cause to
be done by virtue of thsi power of attorney and the rights and powers
herein grants.  The undersigned acknowledges that the foregoing attorney in
fact, is serving in such capacity at the request of the undersigned, and is
not assuming, nor is the Company assuming, any of the undersigned's
responsibilities to comply with Section 16 of the Securities Exchange Act
of 1934.

This Power of Attorney whall remain in full force and effect
until the undersigned is no longer required to file Forms 3, 4, and 5 with
respect tot he undersigned's holdings of and transactions in securities
issued by the Company, unless earlier revoked by the undersigned in a
signed writing delivered to the foregoing attorney in fact.

IN WITNESS
WHERE OF, the undersigned has caused this Power of Attorney to be executed
as of this 10th day of August, 2005.

/s/Gary Klingl
Signature


GARY KLINGL
Printed Name