CHASKA, Minn.--(BUSINESS WIRE)--Dec. 6, 2006--Entegris' (NASDAQ:ENTG), patented Chambergard^™ technology can significantly increase wafer throughput by reducing load lock vent-up time for deposition and etch process tools in semiconductor manufacturing. Already widely used on 300mm deposition and etch process tools, Chambergard fast vent diffuser technology has been shown to reduce the time required to vent the load lock chamber by 65 percent on installed 200mm tools, while offering a significant improvement in particle reduction.

"Innovative application of our patented filtration technology provides semiconductor manufacturers with a low risk and immediate means of improving throughput and reducing particle adders," said Devon Kinkead, vice president and general manager, gas microcontamination, Entegris. "The Chambergard diffuser technology solution is an integral part of any yield improvement and throughput enhancement program."

Chambergard uses 0.003 micron filtration technology to maximize the volume of ultra pure vent gas delivered to the chamber, while minimizing the disruption of particles that may be present in the chamber. Chambergard upgrade kits are available for most 200mm deposition and dry etch process tools, and are easily installed with minimal downtime.

For more information, please visit Entegris at exhibit # 2B-501 at Semicon Japan, December 6-8.

ABOUT ENTEGRIS

Entegris is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

Chambergard^™ is a trademark of Entegris Inc.

CONTACT: Padilla Speer Beardsley
Patty Hoffman, 612-455-1781
phoffman@psbpr.com


or
Entegris
Steve Cantor, VP of Corporate Relations, 978-436-6500
irelations@entegris.com

SOURCE: Entegris