CHASKA, Minn.--(BUSINESS WIRE)--Dec. 6, 2006--Entegris Inc. (NASDAQ:ENTG) introduces its Extreme Clean Dry Air (XCDA^®) gas purification system for use as a safer and more cost-effective alternative to conventional nitrogen gas purging in reticle pods and stockers. XCDA purified clean dry air is production-proven in hundreds of scanner lens purge systems worldwide, is as chemically clean - and about 40 percent less expensive than house nitrogen, and has none of the asphyxiation risks associated with continuous nitrogen purge.

"Our XCDA reticle purge gas supply system offers our customers a safer and more economical means of purging critical mask storage environments with ultra high purity gas," said Devon Kinkead, vice president and general manager, gas microcontamination, Entegris. "Our lithography production-proven XCDA system is the perfect ultra-pure gas source to extend reticle life, a major cost driver for our customers."

The XCDA purification system has been production proven in hundreds of photolithography systems since being introduced in 2000. The dual-bed, self-regenerating design purifiers house clean dry air to maintain a continuous flow of ultra-pure gas. Entegris recently reached an industry milestone by surpassing its 300th installation.

For more information, please visit Entegris at exhibit # 2B-501 at Semicon Japan, December 6-8.

ABOUT ENTEGRIS

Entegris is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

XCDA^® is a registered trademark of Entegris Inc.

CONTACT: Entegris Inc.
Patty Hoffman, 612-455-1781
phoffman@psbpr.com
or


Steve Cantor, VP of Corporate Relations, 978-436-6500
irelations@entegris.com

SOURCE: Entegris Inc.