SAN FRANCISCO, July 15, 2008 (PRIME NEWSWIRE) -- Entegris, Inc. (Nasdaq:ENTG) today launched two new chemical filtration products at the SEMICON West 2008 trade show in San Francisco, July 15-17. The SiLVERSET and Scanner Pre-Filter System products support the industry's next-generation advances in lithography by controlling airborne molecular contamination (AMC) in and around the photobay.

The new SiLVERSET Chemical Air Filter uses a blend of filter media developed specifically for effective control of Trimethylsilanol (TMS) and related low molecular weight silicon organic compounds, a source of contamination that is becoming increasingly critical in advanced photolithography processes. SiLVERSET also provides increased condensable organic life performance and is an easy retrofit with installed scanner Entegris filtration systems used in the photobay.

Entegris also introduced a Scanner Pre-Filter System for use with all OEM scanner filter systems to provide even greater protection from low molecular weight silicon organic compounds. The Scanner Pre-Filter System extends the organic life of the integrated OEM scanner filter system and will enable the end user to be compliant with all OEM environment specifications.

"Both the SiLVERSET and the Entegris Scanner Pre-Filter System are natural extensions of Entegris' market-leading filtration technologies which help to control scanner lens contamination due to airborne molecular compounds," said Jitze Stienstra, Entegris' director of product marketing for gas filtration products. "The solutions satisfy the most stringent photobay environment specifications of the leading scanner OEMs, and when combined with our analytical services, offer a powerful solution to measuring and containing low molecular weight silicon organic contamination."

For more information, visit Entegris at SEMICON West 2008, booth 1021 in the South Hall of the Moscone Center.

About Entegris

Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, India, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

SiLVERSET is a trademark of Entegris, Inc.

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CONTACT: Padilla Speer Beardsley
Patty Hoffman
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Entegris, Inc.
Steve Cantor, VP of Corporate Relations
978-436-6500
irelations@entegris.com