CHASKA, Minn.--(BUSINESS WIRE)--Dec. 6, 2006--The new Ultrapak^® Edge Guard 200mm wafer shipping box from Entegris Inc. (NASDAQ:ENTG), provides reduced edge contamination in a proven secure shipping environment. Users can expect to see a reduction of 50 percent or greater in particle contamination due to edge contact.

As the semiconductor industry moves to smaller linewidth device geometries, device makers are looking to reduce particulate contamination in the previously ignored edge exclusion area. "Semiconductor manufacturers using 200mm wafers are increasingly concerned with maximizing the usable wafer area," said Patrick McKinney, vice president and general manager, microenvironments, Entegris. "The new Entegris Ultrapak Edge Guard reduces particle contamination from edge contact lowering the potential for particle-induced device defects during circuit fabrication."

Designed for reuse, the new Ultrapak Edge Guard 200mm shipper also delivers the established benefits of the highly successful Ultrapak shipping boxes. Horizontal and vertical robotic pickup flanges on the cassette allow for convenient handling, while center notch track alignment and "H" bar features ensure accurate equipment interoperability.

ABOUT ENTEGRIS

Entegris is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

Ultrapak^® is a registered trademark of Entegris Inc.

CONTACT: Entegris Inc.
Patty Hoffman, 612-455-1781
phoffman@psbpr.com
or


Steve Cantor, VP of Corporate Relations, 978-436-6500
irelations@entegris.com

SOURCE: Entegris Inc.