CHASKA, Minn.--(BUSINESS WIRE)--Nov. 2, 2006--The new Guardian^® family of high-flow cartridge filters from Entegris, Inc. (Nasdaq:ENTG) is designed to be non-reactive to a wide range of plating additives and provide superior particle retention capability and longer life. Guardian ECD filter cartridges are ideal for high-purity electrochemical deposition processes, such as copper, nickel, and gold plating.

"The Guardian ECD filters can enable today's leading edge processes with reduced cost through its proprietary membrane technology," said Chad Ruwe, Entegris vice president, Liquid Microcontamination Control Business.

Guardian ECD filters use an optimized membrane pore structure and feature proprietary PolySulfone (PES) membranes that will not react to a variety of plating bath additives, thereby eliminating effects that can compromise process quality. This unique hydrophilic membrane reduces the occurrence of micro-bubble formation during wafer processing, a significant contributor to wafer defects.

The Guardian ECD filter cartridge, which is available in 0.1um-0.05um pore sizes, are compatible with most housings, are quick to install, and do not require any pre-wetting or flushing procedures for quick startups. The high filter area and optimized flow design also help extend service life and reduce downtime associated with replacement. The filters offer a maximum operating temperature range to 60 degrees C (140 degrees F).

ABOUT ENTEGRIS

Entegris (merged with Mykrolis in August 2005) is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001-certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

CONTACT: Entegris, Inc.
Patty Hoffman, 612-455-1781
phoffman@psbpr.com
or


Steve Cantor, 978-436-6500
irelations@entegris.com

SOURCE: Entegris, Inc.