News Release Details


Photo Release -- Entegris Sets New Standard for High-flow WEC Contamination Control

Jul 16, 2007 at 12:00 AM EDT
Photo Release -- Entegris Sets New Standard for High-flow WEC Contamination Control

CHASKA, Minnesota, July 16, 2007 (PRIME NEWSWIRE) -- Entegris (Nasdaq:ENTG) is setting the new standard for liquid contamination control of nano-scale particles in wet etch and clean (WEC) manufacturing processes used in advanced semiconductor applications with the launch of its Torrento™ family of high-flow liquid filters. The new membrane technology provides users exceptional flow performance without compromising retention at a 20nm pore size rating. Torrento filters also feature Entegris' industry-standard, non-dewetting surface technology for use in a high-flow recirculated bath with aggressive aqueous chemistries.

A photo accompanying this release is available at http://www.primenewswire.com/newsroom/prs/?pkgid=3934

"Contamination control becomes increasingly more difficult as semiconductor manufacturers drive their sub-45nm technology applications," said Chad Ruwe, Entegris vice president, Liquid Microcontamination business. "With the Torrento high-flux platform of WEC filter products, Entegris has built on its proven expertise in membrane and filtration technology to help fabrication facilities improve yields, while maintaining the lowest cost of ownership without sacrificing contamination control."

For more information on the Torrento platform of high-flux WEC filters, please visit the Entegris exhibit #1020 at the SEMICON West show, July 17-19, in San Francisco.

ABOUT ENTEGRIS

Entegris is the global leader in materials integrity management, delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

Entegris, Mykrolis and Torrento are registered trademarks of Entegris, Inc.

The photo is also available via AP PhotoExpress.

CONTACT: Padilla Speer Beardsley
Patty Hoffman
(612) 455-1781
phoffman@psbpr.com

Entegris, Inc.
Steve Cantor, VP of Corporate Relations
(978) 436-6500
irelations@entegris.com