SEC Form 4

FORM 4		UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940	OMB APPROVAL OMB Number: 3235-0287 Estimated average burden hours per response: 0.5
	Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

1. Name and Address of Reporting Person* DAUWALTER JAMES E (Last) (First) (Middle) 3500 LYMAN BOULEVARD (Street) CHASKA MN 55318 (City) (State) (Zip)	2. Issuer Name and Ticker or Trading Symbol ENTEGRIS INC [ ENTG ]	5. Relationship of Reporting Person(s) to Issuer (Check all applicable) X Director 10% Owner X Officer (give title below) Other (specify below) CEO, President
	3. Date of Earliest Transaction (Month/Day/Year) 11/19/2004
	4. If Amendment, Date of Original Filed (Month/Day/Year)	6. Individual or Joint/Group Filing (Check Applicable Line) X Form filed by One Reporting Person Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1. Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed Of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
			Code	V	Amount	(A) or (D)	Price
Common Stock	11/19/2004	11/19/2004	G	V	260,000	D	$0.00	374,244	I	by Carville Company, LP
Common Stock	11/19/2004	11/19/2004	G	V	260,000	A	$0.00	260,000	I	by GRAT
Common Stock	11/19/2004	11/19/2004	G	V	260,000	D	$0.00	0	I	by GRAT
Common Stock	11/19/2004	11/19/2004	G	V	260,000	A	$0.00	684,065(1)(2)	D
Common Stock	12/06/2004	12/06/2004	G	V	12,000	D	$0.00	21,993	I	by JJD Industries, LLC
Common Stock	12/06/2004	12/06/2004	G	V	12,000	A	$0.00	12,000	I	by Carville III, LP(3)
Common Stock	12/06/2004	12/06/2004	G	V	260,996	D	$0.00	0	I	by family members
Common Stock	12/06/2004	12/06/2004	G	V	260,996	A	$0.00	272,996	I	by Carville III, LP
Common Stock	12/08/2004	12/08/2004	G	V	327,004	D	$0.00	357,061(1)(2)	D
Common Stock	12/08/2004	12/08/2004	G	V	327,004	A	$0.00	600,000	I	by Carville III, LP
Common Stock	02/25/2005	02/25/2005	G	V	104,780	D	$0.00	186,393	I	by Carville Company II, LP
Common Stock	02/25/2005	02/25/2005	G	V	104,780	A	$0.00	104,780	I	by Judith Dauwalter GRAT II
Common Stock	02/25/2005	02/25/2005	G	V	104,780	D	$0.00	0	I	by Judith Dauwalter GRAT II
Common Stock	02/25/2005	02/25/2005	G	V	104,780	A	$0.00	104,780	I	by family members
Common Stock	02/25/2005	02/25/2005	G	V	104,780	D	$0.00	81,613	I	by Carville Company II, LP
Common Stock	02/25/2005	02/25/2005	G	V	104,780	A	$0.00	104,780	I	by GRAT II
Common Stock	02/25/2005	02/25/2005	G	V	104,780	D	$0.00	0	I	by GRAT II
Common Stock	02/25/2005	02/25/2005	G	V	104,780	A	$0.00	461,841(1)(2)	D
Common Stock	02/25/2005	02/25/2005	G	V	4,277	D	$0.00	77,336	I	by Carville Company II, LP
Common Stock	02/25/2005	02/25/2005	G	V	4,277	A	$0.00	26,270	I	by JJD Industries, LLC
Common Stock	03/09/2005	03/09/2005	G	V	104,780	D	$0.00	0	I	by family members
Common Stock	03/09/2005	03/09/2005	G	V	104,780	A	$0.00	566,621(1)(2)	D
Common Stock	03/09/2005	03/09/2005	G	V	260,000	D	$0.00	306,621(1)(2)	D
Common Stock	03/09/2005	03/09/2005	G	V	260,000	A	$0.00	634,244	I	by Carville Company, LP
Common Stock								251,861(4)	I	by ESOP

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security (Instr. 3)	2. Conversion or Exercise Price of Derivative Security	3. Transaction Date (Month/Day/Year)	3A. Deemed Execution Date, if any (Month/Day/Year)	4. Transaction Code (Instr. 8)		5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)		6. Date Exercisable and Expiration Date (Month/Day/Year)		7. Title and Amount of Securities Underlying Derivative Security (Instr. 3 and 4)		8. Price of Derivative Security (Instr. 5)	9. Number of derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4)	10. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	11. Nature of Indirect Beneficial Ownership (Instr. 4)
				Code	V	(A)	(D)	Date Exercisable	Expiration Date	Title	Amount or Number of Shares

Explanation of Responses:

1. Reporting Person received a restricted stock grant of 16,250 shares on October 15, 2003. Reporting Person will be entitled to recieved 25% of such shares on each of October 14, 2004, 2005, 2006, and 2007 provided Reporting Person has complied with certain restrictions such as continued employment.

2. Reporting Person received a restricted stock grant of 21,667 shares on October 15, 2004. Reporting Person will be entitled to receive 25% of such shares on each of October 15, 2005, 2006, 2007, and 2008 provided Reporting Person has complied with certain restrictions such as continued employment.

3. This entity was formed as part of a series of transactions for estate planning purposes.

4. Since the reporting person's last report, 170 shares previously held through the ESOP have been sold to cover administrative expenses.

Remarks:

	By: /s/ Lori Cameron, Attorney-in-Fact for James E. Dauwalter	07/14/2005
	** Signature of Reporting Person	Date
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 4 (b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.