FORM 4	UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549	OMB APPROVAL	
    Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).	STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP
Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940	OMB Number: 3235-0287
Expires: January 31, 2005
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Filed By
Romeo and Dye's
Section 16 Filer
www.section16.net

1. Name and Address of Reporting Person*
Quernemoen, Daniel R.	2. Issuer Name and Ticker or Trading Symbol
Entegris, Inc. (ENTG)	6. Relationship of Reporting Person(s)
to Issuer (Check all applicable)
X Director                                       10% Owner
    Officer (give title below)          Other (specify below)
                                                   	
(Last)      (First)     (Middle)
3500 Lyman Boulevard
  	3. I.R.S. Identification Number
of Reporting Person, 
if an entity (voluntary) 
  	4. Statement for
Month/Day/Year 
March 18, 2003		
(Street)
Chaska, MN 55318 		5. If Amendment,
Date of Original
(Month/Day/Year)
 	7. Individual or Joint/Group Filing (Check Applicable Line)
X Form filed by One Reporting Person
    Form filed by More than One Reporting Person	
(City)     (State)     (Zip)	Table I — Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned	
1. Title of Security
(Instr. 3)	2. Trans-
action 
Date
(Month/ Day/
Year) 	2A. Deemed 
Execution
Date,
if any 
(Month/Day/
Year)	3. Trans-
action Code
(Instr. 8)	4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 & 5)	5. Amount of 
Securities 
Beneficially 
Owned Follow-
ing Reported Transactions(s) 
(Instr. 3 & 4)	6. Owner-
ship Form:
Direct (D)
or Indirect (I)
(Instr. 4)	7. Nature of Indirect 
Beneficial Ownership
(Instr. 4)	
			Code	V	Amount	(A)
or
(D)	Price				
Common Stock	03/18/03	 	S	 	6,000	D	$10.10	332,252	D	by trust	
Common Stock	 	 	 	 	 	 	 	52,200	I	by Charitable Remainder Unitrust	
Common Stock	 	 	 	 	 	 	 	200,341	I	by family member	
Common Stock	 	 	 	 	 	 	 	351,349	I	by ESOP	
Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. 
* If the form is filed by more than one reporting person, see Instruction 4(b)(v). 

Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number 	

FORM 4 (continued)	Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)	
1. Title of Derivative Security

(Instr. 3)	2. Conver-
sion or 
Exercise 
Price of Derivative Security	3. Trans-
action Date

(Month/
Day/
Year) 	3A. Deemed 
Execution
Date,
if any 
(Month/
Day/
Year)	4. Trans-
action
Code

(Instr. 8)	5. Number of Derivative Securities Acquired (A) or Disposed of (D)

(Instr. 3, 4 & 5)	6. Date Exercisable
and Expiration
Date
(Month/Day/
Year)	7. Title and Amount of Underlying Securities
(Instr. 3 & 4)	8. Price of Derivative Security
(Instr. 5)	9. Number of
Derivative
Securities
Beneficially
Owned
Following 
Reported Transaction(s) 
(Instr. 4)	10. Owner-
ship Form
of Deriv-
ative
Security:
Direct (D)
or Indirect (I)
(Instr. 4)	11. Nature of Indirect Beneficial Ownership
(Instr. 4)	
				Code	V	(A)	(D)	Date Exer-cisable	Expira-
tion
Date	Title	Amount or Number of
Shares					
Stock Option (Right to Buy)	$3.15	 	 	 	 	 	 	 (1)	04/04/03	Common Stock	173,688	 	173,688	D	 	
Stock Option (Right to Buy)	$9.63	 	 	 	 	 	 	 (1)	04/04/03	Common Stock	10,000	 	10,000	D	 	
Stock Option (Right to Buy)	$11.00	 	 	 	 	 	 	 (1)	04/04/03	Common Stock	300	 	300	D	 	
Stock Option (Right to Buy)	$11.99	 	 	 	 	 	 	07/21/03	01/20/13	Common Stock	9,000	 	9,000	D	 	
Explanation of Responses:
(1) 100% vested.	
 	By: /s/ Lori Cameron
             Attorney-in-Fact for Daniel R. Quernemoen
**Signature of Reporting Person	March 18, 2003
Date 	
**Intentional misstatements or omissions of facts constitute Federal Criminal Violations. 
See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a). 
Note: File three copies of this Form, one of which must be manually signed. 
          If space is insufficient, See Instruction 6 for procedure. 
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.