FORM 4

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

OMB APPROVAL

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP
Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

OMB Number: 3235-0287
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Filed By Romeo & Dye's Instant Form 4 Filer
www.section16.net

1. Name and Address of Reporting Person*
Geyer, Stan

2. Issuer Name and Ticker or Trading Symbol
Entegris, Inc. (ENTG)

6. Relationship of Reporting Person(s)
to Issuer (Check all applicable)
X Director                                       10% Owner
    Officer (give title below)          Other (specify below)

(Last)      (First)     (Middle)
3500 Lyman Boulevard

3. I.R.S. Identification Number
of Reporting Person, 
if an entity (voluntary)

4. Statement for
Month/Day/Year 
December 3, 2002

(Street) Chaska, MN 55318 | | 5. If Amendment, Date of Original (Month/Day/Year) November 27, 2002 | 7. Individual or Joint/Group Filing (Check Applicable Line) X Form filed by One Reporting Person Form filed by More than One Reporting Person
(City)     (State)     (Zip) | Table I — Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned

1. Title of Security
(Instr. 3)

2. Trans-
action 
Date
(Month/ Day/
Year)

2A. Deemed 
Execution
Date,
if any 
(Month/Day/
Year)

3. Trans-
action Code
(Instr. 8)

4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 & 5)

5. Amount of 
Securities 
Beneficially 
Owned Follow-
ing Reported Transactions(s) 
(Instr. 3 & 4)

6. Owner-
ship Form:
Direct (D)
or Indirect (I)
(Instr. 4)

7. Nature of Indirect 
Beneficial Ownership
(Instr. 4)

| | | Code | V | Amount | (A) or (D) | Price | | |
Common Stock | 11/27/02 | | G | V | 1,500 | D | N/A | | |
Common Stock | 11/27/02 | | G | V | 73,500 | D | N/A | 493,121 | D | by trust
Common Stock | | | | | | | | 15,000 | I | by SBCA Charitable Remainder Unitrust^(1)
Common Stock | 11/27/02 | | G | V | 1,500 | D | N/A | | |
Common Stock | 11/27/02 | | G | V | 73,500 | D | N/A | 338,918 | I | by family members
Common Stock | | | | | | | | 400,000 | I | by Transend Company, LP^(2)
Common Stock | | | | | | | | 30,925 | I | by family foundation
Common Stock | 11/27/02 | | G | V | 73,500 | A | N/A | | |
Common Stock | 11/27/02 | | G | V | 3,000 | A | N/A | | |
Common Stock | 11/27/02 | | G | V | 73,500 | A | N/A | 150,000 | I | by Transend Company II, LP^(3)
Common Stock | 11/27/02 | | G | V | 1,500 | A | N/A | | |
Common Stock | 11/27/02 | | G | V | 1,500 | A | N/A | | |
Common Stock | 11/27/02 | | G | V | 3,000 | D | N/A | 0 | I | by CHAE Industries, LLC^(4)
Common Stock | | | | | | | | 291,878 | I | by ESOP

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. 
* If the form is filed by more than one reporting person, see Instruction 4(b)(v). 

Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number

FORM 4 (continued)

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security

(Instr. 3)

2. Conver-
sion or 
Exercise 
Price of Derivative Security

3. Trans-
action Date

(Month/
Day/
Year)

3A. Deemed 
Execution
Date,
if any 
(Month/
Day/
Year)

4. Trans-
action
Code

(Instr. 8)

5. Number of Derivative Securities Acquired (A) or Disposed of (D)

(Instr. 3, 4 & 5)

6. Date Exercisable
and Expiration
Date
(Month/Day/
Year)

7. Title and Amount of Underlying Securities
(Instr. 3 & 4)

8. Price of Derivative Security
(Instr. 5)

9. Number of
Derivative
Securities
Beneficially
Owned
Following 
Reported Transaction(s) 
(Instr. 4)

10. Owner-
ship Form
of Deriv-
ative
Security:
Direct (D)
or Indirect (I)
(Instr. 4)

11. Nature of Indirect Beneficial Ownership
(Instr. 4)

| | | | Code | V | (A) | (D) | Date Exer-cisable | Expira- tion Date | Title | Amount or Number of Shares | | | |
Stock Option (right to buy) | $ 3.15 | | | | | | | ^(5) | 12/11/07 | Common Stock | 294,574 | | 294,574 | D |
Stock Option (right to buy) | $3.15 | | | | | | | ^(6) | 2/11/08 | Common Stock | 254,744 | | 254,744 | D |
Stock Option (right to buy) | $9.63 | | | | | | | ^(7) | 9/18/10 | Common Stock | 30,000 | | 30,000 | D |
Stock Option (right to buy) | $8.38 | | | | | | | ^(8) | 11/26/10 | Common Stock | 90,000 | | 90,000 | D |
Stock Option (right to buy) | $ 11.00 | | | | | | | ^(9) | 7/11/10 | Common Stock | 300 | | 300 | D |
Stock Option (right to buy) | $8.04 | | | | | | | ^(10) | 10/15/11 | Common Stock | 120,000 | | 120,000 | D |
Stock Option (right to buy) | $ 5.90 | | | | | | | ^(11) | 10/15/12 | Common Stock | 100,000 | | 100,000 | D |

Explanation of Responses:
(1) Form 4 was amended to add this indirect ownership which was inadvertently not included in Reporting Person's last Form 4.
(2) Transend Company, LP is a grantor retained annuity trust and was formed as a part of a series of transactions for estate planning purposes.
(3) Transend Company II, LP is a grantor retained annuity trust and was formed as a part of a series of transactions for estate planning purposes.
(4) CHAE Industries, LLC was formed as part of a series of transactions for estate planning purposes.
(5) 100% vested
(6) 100% vested
(7) 15,000 shares are exercisable; 7,500 additional shares will become exercisable on each of August 19, 2003 and 2004.
(8) 22,500 shares are exercisable; an additional 22,500 shares will vest on each of November 27, 2002, 2003 and 2004.
(9) 100% vested
(10) 30,000 shares are exercisable; 30,000 additional shares will become exercisable on each of October 15, 2003, 2004 and 2005.
(11) 25,000 shares will become exercisable on each of October 15, 2003, 2004, 2005 and 2006.

| By: /s/ Lori Cameron Attorney-in-Fact for Stan Geyer **Signature of Reporting Person | December 3, 2002 Date

**Intentional misstatements or omissions of facts constitute Federal Criminal Violations. 
See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a). 
Note: File three copies of this Form, one of which must be manually signed. 
          If space is insufficient, See Instruction 6 for procedure. 
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB Number.